Characterization of Amorphous and Crystalline Rough Surfaces -- Principles and Applications
Experimental Methods in the Physical Science Vol. 37
Y.-P. Zhao, G.-C. Wang, and T.-M. Lu
To be published by Academic Press
TABLE OF CONTENTS
PREFACE
Chapter 1. INTRODUCTION
Chapter 2. STATISTICAL NATURE OF ROUGH SURFACES
2.1 First-Order Statistics: Surface Height Distribution Function and Characteristic Function
2.2 Second-Order Statistics: Auto-Correlation Function, Height-Height Correlation Function, and Power Spectrum
2.3 Other Statistical Properties of a Random Rough Surface
2.4 Numerical Estimation of the Roughness Parameters
2.5 Summary
Chapter 3. EXAMPLES OF RANDOM ROUGH SURFACES
3.1 Self-Affine Surfaces
3.2 Mounded Surfaces
3.3 Anisotropic Surfaces
3.4 Dynamics of Random Rough Surface Formation
3.5 Generating Rough Surfaces
3.6 Summary
Chapter 4. REAL-SPACE SURFACE PROFILING TECHNIQUES
4.1 Scanning Techniques
4.2 Imaging Techniques
4.3 Summary
Chapter 5. EFFECTS OF FINITE TIP AND SAMPLE SIZES
5.1 Finite Tip Size Effects in SPM Measurements
5.2 Finite Sampling Size Effect in Image Analysis
5.3 Summary
Chapter 6. DIFFRACTION TECHNIQUES -- FUNDAMENTALS
6.1 Scattering and Diffraction Concepts
6.2 Multi-Atom Diffraction
6.3 Diffraction from Rough Surfaces -- General Formula
6.4 Diffraction from Rough Surfaces -- Continuum Theory
6.5 Summary
Chapter 7. DIFFRACTION FROM RANDOM ROUGH SURFACES
7.1 General Properties of Diffraction Profiles
7.2 Diffraction from a Gaussian Rough Surface
7.3 Diffraction from Multi-Step Surfaces in 2+1 Dimensions
7.4 Summary
Chapter 8. DIFFRACTION TECHNIQUES -- EXPERIMENTATION
8.1 The Diffraction Geometries
8.2 The Measured Diffraction Intensity Profile
8.3 Practical Issues in Diffraction Measurement
8.4 Summary
Chapter 9. SELF-AFFINE FRACTAL SURFACES
9.1 Real-Space Characteristics
9.2 Diffraction from an Isotropic Self-Affine Gaussian Surface
9.3 An Example: The Backside of Silicon Wafers
9.4 Diffraction from Discrete Self-Affine Surfaces
9.5 Summary
Chapter 10. MOUNDED SURFACES
10.1Real-Space Characteristics
10.2 Diffraction from Mounded Surfaces
10.3 Diffraction from Discrete Mounded Surfaces
10.4 Examples
10.5 Summary
Chapter 11. ANISOTROPIC SURFACES
11.1 Real-Space Characteristics
11.2 Diffraction from Anisotropic Surfaces
11.3 An Example: The Hard-Disk Surface
11.4 Summary
Chapter 12. NON-GAUSSIAN SURFACES
12.1 Height Difference Distribution P(z, r) and Height Difference Function C(k, r)
12.2 Diffraction Structure Factors from Non-Gaussian Surfaces
12.3 Summary
Chapter 13. TWO-DIMENSIONAL FRACTAL SURFACES
13.1 A Discrete Two-Level Surface
13.2 Special Cases for Discrete Two-Level Surfaces
13.3 Continuous Two-Level Surfaces
13.4 Determination of Roughness Parameters
13.5 Summary
Chapter 14. TRANSITION TO MULTILAYER STRUCTURES
14.1 Intensity Oscillations
14.2 Diffraction from Dynamic Roughening Fronts
14.3 Summary
Chapter 15. TRANSMISSION DIFFRACTION AND FRACTALS
15.1 Transmission Diffraction Geometry
15.2 Three-Dimensional Fractal Structures
15.3 Diffraction Characteristics
Chapter 16. EFFECTS OF SURFACE ROUGHNESS: EXAMPLES
16.1 Local Slope, Surface Area, and Surface Energy
16.2 Effect of Surface/Interface Roughness on Electrical Properties of Thin Films
16.3 Effect of Surface/Interface Roughness on Magnetic Properties of Thin Films
16.4 Effect of Surface/Interface Roughness on Electronic Device Operations
16.5 Summary
Appendix A. GROWTH DYNAMICS
Appendix B. TIME EVOLUTION OF THE INTERFACE WIDTH IN THE EDWARDS-WILKINSON EQUATION
Appendix C. EFFECT OF DIFFERENT FUNCTIONAL FORMS OF THE SCALING FUNCTION ON THE SHAPE OF THE DIFFRACTION PROFILE
Appendix D. JOINT DISTRIBUTIONS OF RANDOM PROCESSES WITH NON-GAUSSIAN HEIGHT DISTRIBUTIONS
Appendix E. HEIGHT DIFFERENCE FUNCTION C(k, r) FOR DIFFERENT HEIGHT DISTRIBUTIONS
Appendix F. A PERTURBATIVE SOLUTION OF SINE-GORDEN EQUATION
Appendix G. SPECKLE
Appendix H. DIFFRACTION OF AN ULTRAFAST RADIATION PULSE
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