Deposition and Study of Low Dielectric Constant Vapor Depositable
Polymers
Many polymers have been studied in hopes of identifying thermally stable
materials with low dielectric constants which form high quality films through
CVD. Such films show great promise as interlayer dielectrics in interconnect
technology. Materials with low dielectric constants are not only necessary for
high speed chips but also reduce crosstalk, making the chip more efficient.
Responses to:Prof. T.-M. Lu
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