Analysis of Si Film Texture

(Zhao: since April, 1995)

A focused laser detector array is used to study the light scattering of roughening surface. Dynamic growth of Si films on Si substrate is also studied using evaporation, sputtering, and chemical vapor deposition.

Future goals include real-time detection of dynamic growth and texture control for use in optical devices.


This page was last updated July 28, 1995.

Responses to: Prof. T.-M. Lu


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