Chi-I Lang

Home: (518) 272-4590
Work: (518) 276-8487

Email: langc@rpi.edu

Doctoral Thesis Topic

Synthesis of New Vapor-Depositable Low Dielectric Material for Use as On-chip Dielectrics

Research Experience

• interdisciplinary research experience with the IBM research group, and researchers at Rensselaer Polytechnic Institute, the Center for Integrated Electronics (CIE)
• extensive experience in the synthesis and characterization of fluorinated compounds, air- and moisture-sensitive
• high and medium pressure fluorination and Diels-Alder reaction
• chemical vapor deposition (CVD) of low dielectric constant materials
• experienced in photochemical polymerization of fluorinated compounds
• separation technique: spinning band distillation column, column chromatography, TLC and GC
• experienced in using NMR, TMA, TGA, DSC, and FTIR for analysis and characterization

Recent Related Publications

"Chemical Vapor Deposition of Fluorinated Polymers", ACS Annual Meeting, Polymer Preprints, 33(1), pp 427-428, 1993.

"Vapor Deposition of Parylene-F Films from Precursor", Mat. Res. Soc. Simp. Proc. (Pittsburgh, PA), vol. 282, pp 593-598, 1993.

"Vapor Deposition of Parylene-F by Pyrolysis of Dibromotetrafluoro-p-xylene", J. Vac. Sci. Technol., A 11(6), pp 3047-3052, 1993.

"a, a, a', a' Poly-tetrafluoro-p-xylylene as an Interlayer Dielectric for Thin Film Multichip Modules and Integrated Circuits", J. vac. Sci. Technol., B 11(5), pp 1825-1832, 1993

"Chemical Vapor Deposition of Aromatic Polymers", ACS Annual Meeting, Poly. Mat. Sci. Eng., 72, pp 437, 1995.

"Low K Vapor Deposition of Polymer Films", Material Research Society, San Francisco Spring Meeting, presented and manuscript submitted, 1995.

"Vapor-Depositable, Low Dielectric Constant Polymers", chapter of "Polymers for Microelectronics" book, ACS Symposium manuscript submitted, 1995.
Contact Chi-I Lang

This page was last updated July 25, 1995.

Responses to:Prof. T.-M. Lu

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