Center for Microcontamination Control

The Center for Microcontamination Control is an NSF (National Science Foundation) Industry/University Cooperative Research Center with research sites at the Northeastern University, the University of Arizona, and Rensselaer.

The UA site was established in 1989 and has research in high-K dielectric contamination, bacterial contamination, and ultrapure water (UPW) research.

The Rensselaer site was established in 1998 and has research in CMP and electrochemical planarization.

As a sponsor, KLA-Tencor has contributed a KLA-2135 Defect Inspection Station, providing a unique capability to detect submicron defects on 8-inch patterned wafers.

Northeastern University established a site in 2002 with research in nano and microscale particle removal.