Toh-Ming Lu 
Associate Director, Center for Integrated Electronics; Ray Palmer Baker Distinguished Professor; Professor of Physics
Education:
Ph.D.,
University
of
Wisconsin
,
Madison
(Physics, 1976).
M.S., Worcester Polytechnic Institute (Physics, 1971).
B.S.,
Cheng Kung University
,
Taiwan
(Physics, 1968).
Career Highlights:
Dr. Lu joined RPI in 1982. He served as the Chairman of the Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute from 1992 to 1997. He was the Director of the Semiconductor Research Corporation (SRC), Center for Advanced Interconnect Science and Technologies (CAIST) from 1999 to 2005 where 13 universities, 25 faculty, and more than 40 graduate students are engaged in a nation-wide interdisciplinary research in microelectronics. His honors include the 2005 SRC Faculty Leadership Award and the 2004 Materials Research Society Medal Award. He is Fellow of four major societies: American Physical Society, American Vacuum Society, American Association for the Advancement of Sciences, and the Materials Research Society. Dr. Lu published over 400 papers, 6 books, 10 patents, and graduated 33 Ph.D. students, who have assumed leadership positions in semiconductor companies such as IBM, Intel, AMD, Motorola, Analog, GE, and Chartered Semiconductor.
Research Interests:
Surface, interface, and thin film morphologies, 3D integrated nano-structure formation; diffraction from imperfect surfaces, overlayers, dynamic growth fronts; growth and characterization of metal, ceramic, and polymeric thin films for nanoelectronics, photonics, and energy applications. Since '82, well funded research by NSF, DARPA, ARO, AFOSR, IBM, DEC, Kodak, Martin-Marietta, GE, Intel, Sheldahl, and AT&T.
Selected Publications:
“Low temperature synthesis of single crystalline ZnO nanorods by oblique angle deposition”, Ranganath Teki , Thomas C. Parker, Huafang Li, Nikhil Koratkar, Toh-Ming Lu, and Sabrina Lee, Thin Solid Films 516, 4993 (2008).
“Shadowing growth of three-dimensional nanostructures on finite size seeds”,
D.-X. Ye, C. L. Ellison, B.-K. Lim, and T.-M. Lu, J. Appl. Phys. 103, 103531 (2008).
“Influence of Nanotips on the Hydrophilicity of Metallic Nanorod Surfaces”,
D.-X. Ye and T.-M. Lu, Phys. Rev. Lett. 100, 256102 (2008).
“Instability of Metal Barrier with Porous Methyl Silsesquioxane Films”,
Pei-I Wang, Jasbir S. Juneja, Y. Ou, T.-M. Lu, and Greg S. Spencer, Journal of The Electrochemical Society, 155(2), H53 (2008).
Novel photocurable epoxy siloxane polymers for photolithography and imprint lithography applications, J. Vac. Sci. Technol. B: Microelectronics and Nanometer Structures, Vol. 26, Issue 1, pp. 244-248 (2008).
“Deformation of amorphous silicon nanostructures subjected to monotonic and cyclic loading”, C. Gaire, D-X. Ye, T-M. Lu, G-C. Wang, and R.C. Picu, J. Mater. Res., Vol. 23, 328, (2008).
Contact:
(518) 276-2979
lut@rpi.edu
Home Page: http://www.rpi.edu/~lut/
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