Applications of Scanning Probe Microscopy
Tentative Course Outline
I. Lectures and discussions
- Chap.1 Introduction
- History of scanning probe microscopy--from barrier tunneling to forces
- Applications--from seeing atoms to nanotechnology
- Chap.2 Forces
- Interatomic interactions
- Intermolecular forces
- Level-tip-sample contact and noncontact interactions
- Forces vs distance in vacuum, air, and air with a contamination layer
- Chap.3 Atomic force microscopy--Instrumentation
- Overall system
- Scanners-- Piezoelectric
- Cantilevers--
- Mechanical properties (Spring constant, The classical solution
to a vibrating level, Normal modes)
- Laser diode feedback detection system
- Image artifacts
- Sources of noise
- Chap.4 Other scanning force microscopies
- Lateral force microscopy-- Friction
- Magnetic force microscopy-- Domain structures
- Other applications--
- Adhesion, static force, lithography, capacitance, local spectroscopy, side wall detection, biological specimen, device failure analysis
- Chap.5 Roughness characterization
- Understanding rough surfaces
- Definition of roughness parameters
- Roughness analysis and data processing
II. Lab---data collection using scanning atomic force microscope
Force measurement
Roughness measurement --Backside of a Si wafer
III. Final written project report
Guide line of preparation of report will be provided for students registered.
to the course description.