RESEARCH -- LED Fabrication

LED Fabrication

Our research topics on LED device fabrication include novel materials for transparent or reflecting contacts, high performance distributed Bragg reflectors (DBRs), omni-directional reflectors (ODRs), anti-reflection coatings, optimization of device geometry and fabrication process, high-refractive-index encapsulation materials. We have state-of-the-art processing equipments including Karl Suss MJB-3 mask aligner, BOC Edwards Auto500 multi-hearth e-beam evaporator, AJA Intl 4 target reactive sputtering system, chemically-assisted ion-beam etching (CAIBE) system, rapid thermal annealing (RTA) system and O2 plasma asher, dectak surface profile measuring system. All the equipments are housed inside a semi-clean room. All the process steps involving photo-sensitive materials such as photo-resist are performed inside a class 1000 cleanroom module (yellow room).

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