FACILITIES -- Processing Lab

  • Karl Suss MJB-3 Contact Aligner
  • BOCEdwards Auto500 e-beam Evaporation System
  • AJA International Sputtering System
  • Chemically Assisted Ion Beam Etching (CAIBE) System
  • Rapid Thermal Annealing System
  • Dektak 6M Stylus Profiler
  • March Plasmod Plasma Asher
  • Class 1000 Clean Room Module
  • Wet Bench

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