Microfabrication Processing Capability

This is a list of MCR microfabrication tools organized by process type: photolithography, high temperature, etching, metalization / back-end-of-line (BEOL), and measurement. If one tool serves multiple functions, it has been listed multiple times.

Each tool has a link with detailed information about it, and a link to the e-mail addresses of the associated module leads.


Photolithography	Module Lead	Module Secondary
Photo wet benches	J. Jay McMahon
Karl Suss Aligner	Pete Losee	Sameer Chhajed
8 Inch Spin Coater	Yongchai Kwon
5 inch stepper	J. Jay McMahon	Kamal Varadarajan
8 inch stepper	Kamal Varadarajan	J. Jay McMahon

High Temperature	Module Lead	Module Secondary
RCA wet benches	J. Jay McMahon
ASM Oxidation Furnace	Collin Hitchcock
Parylene Deposition Tool	Russ Kraft
Wafer Bonder	Yongchai Kwon
Plasmatherm	Santhosh Balachandran	Lin Zhu
Bruce Furnace	Collin Hitchcock
P5000	J. Jay McMahon
Vertical furnaces	J. Jay McMahon
Rapid Thermal Anneal	J. Jay McMahon

Etching	Module Lead	Module Secondary
Etching wet benches	J. Jay McMahon
Plasmatherm	Santhosh Balachandran	Lin Zhu
CMP Tools	J. Jay McMahon
OnTrak Brush Cleaner	J. Jay McMahon
Lam	J. Jay McMahon
P5000	J. Jay McMahon

Metalization / BEOL	Module Lead	Module Secondary
Metalization wet benches	J. Jay McMahon
CVC Sputterer 1	Darshan Gandhi	Manas Ojha
CVC Sputterer 2	Tom Parker
Parylene Deposition Tool	Russ Kraft
Wafer Bonder	Yongchai Kwon
E-Beam Evaporator #1	Collin Hitchcock
E-Beam Evaporator #2	Collin Hitchcock
Plasmatherm	Santhosh Balachandran	Lin Zhu
CMP Tools	J. Jay McMahon
OnTrak Brush Cleaner	J. Jay McMahon

Measurement	Module Lead	Module Secondary	Module Tertiary
Lab Computers	Dave King
VASE Ellipsometer	Chris Wiegand
Resistivity mapper	Anurag Jindal
XRF	John Barthel
AFM	Vinay Bhagwat	Fazeel Khan	Quan Chen
Testing Lab	Vinay Bhagwat
Nanospec	J. Jay McMahon
Alpha Step surface profiler	J. Jay McMahon