Micro and Nano Fabrication
Clean Room





Processes - Photolithography - Developer - Photo Wet Benches

For training on this equipment, contact the assigned module leads

Wet Benches

Links (Under Construction)


General Information




Training & Usage




 Reservations

Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module lead.


Procedures & Documentation (Under Construction)