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Processes - High Temperature - PECVD - P5000

For training on this equipment, contact the assigned module leads
Applied Materials P5000

Applied Materials P5000

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General Information

The P5000 is a multichamber PECVD system from Applied Materials. This tool is configured for deposition of TEOS and Silicon Nitride. It also has a chamber for sputter etching.

Contact the module lead for further process information.

 


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