Micro and Nano Fabrication
Clean Room

Processes - Measurement - Thin Films - Nanospec 3000

For training on this equipment, contact the assigned module leads

Nanospec - 3000


General Information

The NanoSpec 3000 is a low cost, film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer that is built on a simple-to-use tabletop platform.

The rugged, solid state linear diode array provides fast, precise measurements of single-layer films such as oxide, nitride and photoresist, as well as the top layer on film stacks of up to 3 layers in the thickness range of 250Å to 35µm.

The flexible software platform makes it simple and easy for the user to configure measurement programs and recipes for both simple and advanced measurement applications.

With the ability to select film constants, scan ranges and substrate types, the 3000 is the ideal tool for rapid measurement program development.

Data management features include a database, statistical analysis, histograms and the ability to export data files. Both tabular and Cauchy dispersion models are available for use and material files may be imported and exported.

Training & Usage

Please contact the module lead to schedule a training session. After attending the training session, you are expected to return within one week with your own sample to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.


Reservations: none needed.  Tool is generally used on a first come, first served basis.
Procedures and Documentation

Simplified procedure:

  1. Select appropriate program for film      stack to be measured
  1. Take a reference scan:
    1. Move the stage to the dark reference position (such that the objective is well out of focus).
    2. Click ok.
    3. Focus on the reference sample (silicon chips are usually near the stage).
    4. Click ok.
  1. Measure films:
    1. Be sure surface to be measured is in focus.
    2. Note that the measurement area is indicated in the objective window by a black dot.
Complicated procedure:

If you need to measure a film that is not on the list, or if you have questions about the accuracy of your measurements you can contact the  module lead.