Micro and Nano Fabrication Clean Room




















Overview Map



  Karl Suss Semi-automatic Probe Station Alpha Step Surface Profiler KLA Resistivity Mapper VASE Ellipsometer Flexus Stress Measurement Dektak 8 Surface Profiler Four Point Probe LAM Rainbow Etcher Applied Materials P5000 XRF 8 inch RCA Wet Bench Spin Rinse Dryer 5 inch Wet Processing Bench 4 inch Headway Spinner and Solvent Bench Tousimis Critical Point Dryer Photoresist Stripping Wet Bench Alcatel Deep RIE Etcher NanoSpec 3000 Interferometer K & S Wire Bonder 8 inch Headway Spinner and Solvent Bench OAI Backside Aligner Karl Suss MJB-3 Aligner Olympus Microscope FlexiFab 8 inch Photoresist Spin Coater GCA MUV Stepper Photoresist Developing Wet Bench EVG 501 Wafer Bonder EV Group Smartview Wafer Aligner FlexiFab SOD Coater Drying Oven Microscope Parylene Deposition Tool E-Beam 2 Denton Desk IV Sample Prep Tool CVC Sputterer 2 CVC Sputterer 1 Semitool Copper Electroplater Zeiss Supra SEM Dual Beam FIB NanoInk DPN Veeco AFM AG Rapid Thermal Annealer Bruce Furnace ASM Furnace E-Beam 1 Plasma Therm On Track Brush Cleaner IPEC 372M Wafer Polisher Slurry Wet Bench CMP 2 Ion Mill Titration Station CHDF Suspension Analyzer

1. Karl Suss Semi-automatic Probe Station
13.  5" Wet Processing Bench
25.  8" FlexiFab Resist Spin Coater
37.  Semitool Copper Electroplater
49.  IPEC 372M Wafer Polisher
2.  Alpha Step Surface Profiler
14.  4" Headway Spinner Solvent Bench
26.  Photoresist Developer Wet Bench
38.  Denton Desk IV  and Nano Prep
50.  Slurry Wet Bench
3.  KLA Resistivity Mapper
15.  Tousimis Critical Point Dryer
27.  EV Group 501  Wafer Bonding Tool
39.  Supra SEM
51.  CMP 2
4.  Ellipsometer
16.  Photoresist Stripping  Wet Bench
28.  EVG "Smart View" Wafer Aligner
40.  Dual Beam FIB
52.  Ion Mill
5.  Flexus Stress Measurement
17.  Alcatel DRIE Etcher
29.  FlexiFab SOD Coater
41.  NanoInk DPN
53.  Titration Station
6.  Dektak 8 Surface Profiler
18.  NanoSpec 3000 Interferometer
30.  Drying Oven
42.  Veeco AFM
54.  CHDF Suspension Analyzer
7.  Four Point Probe
19.  K & S Wire Bonder
31.  Microscope
43.  AG Rapid Thermal Annealer
55.  Tegal Plasma Asher
8.  LAM Rainbow Etcher
20.  8" Headway Spinner Solvent Bench
32.  Parylene Deposition Tool
44.  Bruce Furnace

9.  AMAT P5000
21.  OAI Backside Aligner
33.  E-Beam 2
45.  ASM Furnace

10.  XRF
22.  Karl Suss MJB3 Aligner
34.  Denton Desk IV  Sample Prep Tool
46.  E-Beam 1
11.  8" RCA Wet Bench
23.  Olympus Microscope
35.  CVC Sputterer 2
47.  Plasma Therm

12.  Spin Rinse Dryer
24.  GCA MUV Stepper
36.  CVC Sputterer 1
48.  On Track Brush Cleaner








Note:  Click on any of the numbered items on the map above or on the numbered links above to go to that tool's page for additional information on the tool.

















MNCR Staff


Clean Room
Manager
David King
(518)-276-2938
kingdc@rpi.edu
Senior Applications
Engineer
David Frey
(518)-276-3323
freym2@rpi.edu
Process
Engineer
J. Jay McMahon
(518)- 276-2451
mcmahj@rpi.edu
Process
Engineer
Bryant Colwill
(518)-276-3946
colwib2@rpi.edu
Equipment
Engineer
John Barthel
(518)- 276-2975
barthj@rpi.edu
Equipment
Engineer
Kent Way
(518)- 276-3317
wayk2@rpi.edu