Micro and Nano Fabrication Clean Room




















Overview Map



  Karl Suss Semi-automatic Probe Station Alpha Step Surface Profiler KLA Resistivity Mapper VASE Ellipsometer Flexus Stress Measurement Dektak 8 Surface Profiler Four Point Probe Trion 1 Etcher Tegal Plasma Asher Ex-situ TEM Sample Prep Analytical Balance Microwave Enhanced CVD Chip Bonder Jipelec RTA Trion 2 Etcher Applied Materials P5000 8 inch RCA Wet Bench Spin Rinse Dryer 5 inch Wet Processing Bench 4 inch Headway Spinner and Solvent Bench Tousimis Critical Point Dryer Photoresist Stripping Wet Bench Alcatel Deep RIE Etcher NanoSpec 3000 Interferometer K & S Wire Bonder 8 inch Headway Spinner and Solvent Bench OAI Backside Aligner Karl Suss MJB-3 Aligner Olympus Microscope FlexiFab 8 inch Photoresist Spin Coater GCA MUV Stepper Photoresist Developing Wet Bench EVG 501 Wafer Bonder EV Group Smartview Wafer Aligner FlexiFab SOD Coater Drying Oven Microscope Parylene Deposition Tool E-Beam 2 Vacuum Oven Lindberg Furnace Denton Desk IV Sample Prep Tool CVC Sputterer 2 CVC Sputterer 1 Semitool Copper Electroplater Zeiss Supra SEM Dual Beam FIB NanoInk DPN Veeco AFM AG Rapid Thermal Annealer Bruce Furnace ASM Furnace E-Beam 1 Plasma Therm On Track Brush Cleaner IPEC 372M Wafer Polisher Slurry Wet Bench CMP 2 Ion Mill Titration Station CHDF Suspension Analyzer


1. Karl Suss Semi-automatic Probe Station
Reservations
13.  5" Wet Processing Bench
25.  8" FlexiFab Resist Spin Coater
37.  Semitool Copper Electroplater
49.  IPEC 372M Wafer Polisher

2.  Alpha Step Surface Profiler

14.  4" Headway Spinner Solvent Bench

26.  Photoresist Developer Wet Bench

38.  Ex-situ TEM Sample Pick and Place

50.  Slurry Wet Bench

3.  KLA Resistivity Mapper

15.  Tousimis Critical Point Dryer

27.  EV Group 501  Wafer Bonding Tool

39.  Supra SEM
Reservations

51.  Microwave Enhanced CVD

4.  Ellipsometer

16.  Photoresist Stripping  Wet Bench

28.  EVG "Smart View" Wafer Aligner

40.  Dual Beam FIB
Reservations

52.  Jipelec RTA

5.  Flexus Stress Measurement

17.  Alcatel DRIE Etcher
Reservations

29.  FlexiFab SOD Coater

41.  NanoInk DPN

53.  Titration Station

6.  Dektak 8 Surface Profiler

18.  NanoSpec 3000 Interferometer

30.  Drying Oven

42.  Veeco AFM
Reservations

54.  CHDF Suspension Analyzer

7.  Four Point Probe

19.  K & S Wire Bonder

31.  Microscope

43.  AG Rapid Thermal Annealer

55.  Tegal Plasma Asher

8.  Trion RIE 1
Reservations

20.  8" Headway Spinner Solvent Bench
Reservations

32.  Parylene Deposition Tool

44.  Bruce Furnace
Reservations

56.  Lindberg Furnace

9.  AMAT P5000

21.  OAI Backside Aligner
Reservations

33.  E-Beam 2
Reservations

45.  ASM Furnace
Reservations

57.  Analytical Balance

10.  Trion RIE 2
Reservations

22.  Karl Suss MJB3 Aligner
Reservations

34.  Denton Desk IV  Sample Prep

46.  E-Beam 1
Reservations

58.  Vacuum Oven

11.  8" RCA Wet Bench

23.  Olympus Microscope

35.  CVC Sputterer 2
Reservations

47.  Plasma Therm
Reservations

59.  Chip Bonder

12.  Spin Rinse Dryer

24.  GCA MUV Stepper

36.  CVC Sputterer 1
Reservations

48.  On Track Brush Cleaner








Note:  Click on any of the numbered items on the map above or on the numbered links above to go to that tool's page for additional information on the tool.

















MNCR Staff


Clean Room
Manager
David King
(518)-276-2938
kingdc@rpi.edu
Senior Applications
Engineer
David Frey
(518)-276-3323
freym2@rpi.edu
Process
Engineer
Bryant Colwill
(518)-276-3946
colwib2@rpi.edu
Equipment
Engineer
John Barthel
(518)- 276-2975
barthj@rpi.edu
Equipment
Engineer
Kent Way
(518)- 276-3317
wayk2@rpi.edu