Micro and Nano Fabrication
Clean Room





Administration Module Leads



MNCR Tool Module Leads


General Information

This is a list of MNCR microfabrication tools organized by process type: photolithography, high temperature, etching, metalization / back-end-of-line (BEOL), and measurement.  If one tool serves multiple functions, it has been listed multiple times.

Each tool has a link with detailed information about it, and a link to the e-mail addresses of the associated module leads.

Current MNCR Equipment Issues

NOTE:  To report problems with clean room equipment send an email to:
      mncr-staff-l@lists.rpi.edu

Photolithography
Module Lead
Secondary Module Lead
Photo Wet Benches
Kent Way
J. Jay McMahon
Karl Suss Aligner
Kent Way J. Jay McMahon
OAI Aligner
Kent Way J. Jay McMahon
EVG SmartView Wafer Aligner (8 inch)
James Lu

Flexifab Spin Coater for PR (8 inch)
Kent Way Bryant Colwill
Headway Spin Coater (4 inch)
Kent Way J. Jay McMahon
Headway Spin Coater (8 inch)
Kent Way J. Jay McMahon
GCA Stepper (8 inch)
Kent Way J. Jay McMahon



Nanolithography
Module Lead
Secondary Module Lead
Carl Zeiss Ultra 1540 Dual Beam FIB/SEM System
David Frey Gopal Pethuraja
Carl Zeiss Supra SEM with Direct Write Attachment
David Frey David King
Nscriptor DPNWriter Dip Pen Nanolithography System
Gopal Pethuraja David Frey



High Temperature
Module Lead
Secondary Module Lead
RCA Wet Benches
Bryant Colwill J. Jay McMahon
ASM Oxidation Furnace
Bryant Colwill
J. Jay McMahon
Compound Semiconductor RTA Bryant Colwill J. Jay McMahon
EV501 Wafer Bonder
James Lu

Plasmatherm
Bryant Colwill J. Jay McMahon
Bruce Oxidation Furnace
Bryant Colwill J. Jay McMahon
P5000
Bryant Colwill Kent Way



Etching
Module Lead
Secondary Module Lead
Etching Wet Benches
Bryant Colwill J. Jay McMahon
Plasmatherm
Bryant Colwill J. Jay McMahon
Alcatel/Adixen AMS100
J. Jay McMahon Kent Way
P5000 Bryant Colwill Kent Way



Metallization and BEOL
Module Lead
Secondary Module Lead
Metallization Wet Benches
Bryant Colwill J. Jay McMahon
CVC Sputterer #1
Kent Way John Barthel
EV501 Wafer Bonder
James Lu
E-Beam Evaporator #1
John Barthel
E-Beam Evaporator #2
John Barthel
Plasmatherm Bryant Colwill J. Jay McMahon
Flexifab Spin Coater for BCB (8 inch)
James Lu

IPEC 372M J. Jay McMahon Bryant Colwill
On Track Brush Cleaner Bryant Colwill J. Jay McMahon
P5000
Bryant Colwill
Kent Way
SemiTool Equinox Copper Electroplater Tim Walsh J. Jay McMahon
Tousimis Critical Point Drier
David Frey J. Jay McMahon
Denton Sputterer David Frey



Packaging
Module Lead
Secondary Module Lead
Karl Suss Probestation
Bryant Colwill J. Jay McMahon
Thermocarbon Dicing Saw
John Barthel J. Jay McMahon
K&S 4523AD Wire Bonder
J. Jay McMahon Bryant Colwill



Measurement
Module Lead
Secondary Module Lead
Lab Computers
Dave King
VASE Ellipsometer
Bryant Colwill Frank Mont
KLA Resistivity Mapper
Bryant Colwill
J. Jay McMahon
XRF
Bryant Colwill
John Barthel
Scanning Force Microscope (AFM)
David Frey
Gopal Pethuraja
Testing Lab
Bryant Colwill J. Jay McMahon
Nanospec
Bryant Colwill J. Jay McMahon
Alpha-Step Surface Profiler
Bryant Colwill J.Jay McMahon
Dektak 8 Surface Profiler
Bryant Colwill J. Jay McMahon
Karl Suss Probestation
Bryant Colwill J. Jay McMahon

Training & Usage

Please contact the responsible module lead to schedule a training session. After attending the training session, you are expected to return within one week to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.

If you do not log onto the equipment for any sixty (60) day period, you forfeit your qualification and must schedule your next session with the module lead to re-test.

Reservations

Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module lead