Micro and Nano Fabrication
Clean Room





Administration Module Leads



MNCR Tool Module Leads


General Information

This is a list of MNCR microfabrication tools organized by process type. If one tool serves multiple functions it has been listed multiple times.

Each tool has a link with detailed information about it and a link to the e-mail addresses of the associated module leads.

NOTE:  To report problems with clean room equipment send an email to:
      mncr-staff-l@lists.rpi.edu

Photolithography
Module Lead
Secondary Module Lead
Photo Wet Benches
Kent Way
Bryant Colwill
Karl Suss Aligner
Kent Way Bryant Colwill
OAI Aligner
Kent Way Bryant Colwill
EVG SmartView Wafer Aligner (8 inch)
James Lu

Flexifab Spin Coater for PR (8 inch)
Kent Way Bryant Colwill
Headway Spin Coater (4 inch)
Kent Way Bryant Colwill
Headway Spin Coater (8 inch)
Kent Way Bryant Colwill
GCA Stepper (8 inch)
Kent Way Bryant Colwill



Nanolithography
Module Lead
Secondary Module Lead
Carl Zeiss Ultra 1540 Dual Beam FIB/SEM System
David Frey Gopal Pethuraja
Carl Zeiss Supra SEM with Direct Write Attachment
David Frey David King
Nscriptor DPNWriter Dip Pen Nanolithography System
Gopal Pethuraja David Frey



High Temperature
Module Lead
Secondary Module Lead
RCA Wet Benches
Bryant Colwill John Barthel
ASM Oxidation Furnace
Bryant Colwill
John Barthel
Compound Semiconductor RTA Bryant Colwill John Barthel
EV501 Wafer Bonder
James Lu

Plasmatherm
Bryant Colwill John Barthel
Bruce Oxidation Furnace
Bryant Colwill John Barthel
P5000
Bryant Colwill Kent Way



Etching
Module Lead
Secondary Module Lead
Etching Wet Benches
Bryant Colwill John Barthel
Plasmatherm
Bryant Colwill John Barthel
Alcatel/Adixen AMS100
Kent Way Bryant Colwill
P5000 Bryant Colwill Kent Way



Metallization and BEOL
Module Lead
Secondary Module Lead
Metallization Wet Benches
Bryant Colwill John Barthel
CVC Sputterer #1
Kent Way Bryant Colwill
EV501 Wafer Bonder
James Lu
E-Beam Evaporator #1
John Barthel Kent Way
E-Beam Evaporator #2
John Barthel Kent Way
Plasmatherm Bryant Colwill John Barthel
Flexifab Spin Coater for BCB (8 inch)
James Lu

IPEC 372M Bryant Colwill Kent Way
On Track Brush Cleaner Bryant Colwill
P5000
Bryant Colwill
Kent Way
SemiTool Equinox Copper Electroplater Bryant Colwill Tim Walsh
Tousimis Critical Point Drier
David Frey
Denton Sputterer David Frey



Packaging
Module Lead
Secondary Module Lead
Karl Suss Probestation
Bryant Colwill Kent Way
Thermocarbon Dicing Saw
John Barthel
K&S 4523AD Wire Bonder
Bryant Colwill John Barthel



Measurement
Module Lead
Secondary Module Lead
Lab Computers
Dave King
VASE Ellipsometer
Bryant Colwill Frank Mont
KLA Resistivity Mapper
Bryant Colwill
Kent Way
Scanning Force Microscope (AFM)
David Frey
Gopal Pethuraja
Testing Lab
Bryant Colwill Kent Way
Nanospec
Bryant Colwill Kent Way
Alpha-Step Surface Profiler
Bryant Colwill Kent Way
Dektak 8 Surface Profiler
Bryant Colwill Kent Way
Karl Suss Probestation
Bryant Colwill Kent Way

Training & Usage

Please contact the responsible module lead to schedule a training session. After attending the training session, you are expected to return within one week to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.

If you do not log onto the equipment for any sixty (60) day period, you forfeit your qualification and must schedule your next session with the module lead to re-test.

Reservations

Reservations for the equipment may be made via Yahoo calendar. Please contact the module lead for login ID and password information.