Micro and Nano Fabrication
Clean Room

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Processes - Metallization and BEOL - Wafer Alignment - Karl Suss MJB3

For training on this equipment, contact the assigned module leads

Karl Suss MJB3


Suss Microtec (Company Website)



Commercial Laboratories


General Information

The SUSS MJB3 series has earned a worldwide reputation for precision, reliability and high performance. Since its release in 1969 more than 2000 machines have been installed worldwide.

The machine is widely used for MEMS and optoelectronics applications.

Training & Usage

Please contact one of the module leads to schedule a training session. After attending the training session, you are expected to return within one week with your own sample to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.


Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module leads.

Procedures & Documentation (Under Construction)