CARRIER HEAD SIZE CONVERSION

Converting Carrier Head to 6 or 8 inch Configuration

The default configuration (until complete 8 inch cleanroom upgrade) for the tool is 5 inch configuration. If the 6 or 8 inch carrier head was used, it must be removed and replaced with the 5 inch head. This process is identical to the "Carrier Head Change" process listed earlier.

1) Select Screen/Arm Control/Move Arm/Unload

2) Use wrench to unscrew the retaining screws from the plastic carrier cover

3) Begin with screw closest to you, and use "Jog Carrier" to access the other screws. Must press and hold this button to jog the

carrier. If you encounter a "spindles not enabled" error, then press Abort, End, Spindle On.

4) Once the screws are removed, the bottom half of the carrier may drop, so be careful! If it does not drop, lift the plastic shield,

grab the bottom half of the carrier, and rock side to side until it separates

5) Clean the bottom half of the carrier (i.e. the black carrier film) with water and wipes

6) Place bottom half of carrier in plastic storage unit

7) Move Arm/Load

8) Select Screen/Load Station Control

9) Shuttle Move to Elevator

10) Select Screen/Arm Control/Move Arm

11) Jog Counter Clock-Wise until arm is over gap between load cup and elevator

12) Reach under the carrier head and remove snap-ring using snap-ring tool. Only widen snap-ring enough to remove it from the groove

in the carrier wrist. Excessive widening can lead to breakage or improper function.

13) Remove 2 set screws on either side of carrier (remove one, then use jog carrier to access the other). Do NOT completely remove the

set screws; they are easily loosened with just a few twists of the wrench. When the screws are loosened, the "T" bar and plastic

cover will fall; keep a hold on both pieces.

14) Slowly remove "T" bar, small rectangular "key" and plastic cover and place in the plastic storage unit

15) Take plastic cover, small rectangular "key" and "T" bar from the 5 inch head. Place the "key" in the slot, and slide on the

plastic cover and the "T" bar.

16) Place the snap-ring under the "T" bar using the snap ring tool

17) Screw in the set screws, making sure that both are seated firmly. This may require an alternating technique -- screw one, then the

other, then the first, etc. until the screws are firmly in place.

18) Move Arm/Unload

19) Take the bottom half of the carrier, and align the teflon piece with the "T" bar. Squeeze the bottom and top halves together until

the plastic cover touches the stainless steel plate.

20) While squeezing the head, turn the plastic cover to align the screws with the screw holes in the stainless steel plate.

21) Screw in all of the carrier head screws, alternating until each are tight. Do not over-tighten.

22) Select Screen/Arm Control/Move Arm/Primary Polish

23) Use screwdriver to remove screw from weight cover on back of arm

24) Use wrench to remove screws from arm weights; remove weights; place weights on CMP shelf

25) Place 5 inch weights

26) Move the weight block forward until it is aligned to the blue line

27) Tighten screws and replace cover

28) Select Screen/Machine Configuration/Wafer Size/125 mm (very important)

29) Select Screen/Arm Control/Calibrate Arm Positions

30) Move to Value = 28500 for 8 inch head; Exit

31) Set Arm Position Primary Polish; Return.

FOR 8 inch polishing, do not use carrier oscillation during polish

30) Move to Value = 29436 for 6 inch head; Exit

31) Set Arm Position Primary Limit; Return