Micro and Nano Fabrication
Clean Room

Processes - Metallization and BEOL - CMP - IPEC 372M

For training on this equipment, contact the assigned module leads
IPEC 372M Polisher

IPEC 372M Wafer Polisher

Links (Under Construction)

General Information

Training & Usage

Please contact the module lead to schedule a training session. After attending the training session, you are expected to return within one week to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.

If you do not log onto the Wafer Polisher for any sixty (60) day period, you forfeit your qualification and must schedule your next session with the module lead to re-test. 

Currently, the equipment is password protected. Qualified users are notified of the current password, as well as the equipment condition, via e-mail on a weekly basis


Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module lead.

Procedures and Documentation