Micro and Nano Fabrication
Clean Room





Processes - Photolithography - Steppers - GCA Stepper

For training on this equipment, contact the assigned module leads
GCA Stepper

GCA Stepper

Links (Under Construction)


General Information

The GCA Stepper is used for wafer patterning on 8" or smaller silicon wafers.

Training & Usage

Please contact the module lead to schedule a training session. After attending the training session, you are expected to return within one week with your own sample to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.

If you do not log onto the GCA Stepper for any sixty (60) day period, you forfeit your qualification and must schedule your next session with the module lead to re-test. 

Currently, the equipment is password protected. Qualified users are notified of the current password, as well as the equipment condition, via e-mail on a weekly basis


Reservations

Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module lead.

Procedures & Documentation (Under Construction)