The vacuum system of e-beam 1 operates in automatic mode. The control panel for vacuum operations is shown in figure 10. All of the operations necessary to bring the chamber from atmosphere to high vacuum are performed automatically when the user presses ``Auto Pump Start''. All of the operations necessary to bring the chamber from high vacuum to atmosphere are performed automatically when the user presses ``Auto Pump Stop''. Sometimes the ion gauge will fail to turn on automatically during pumpdown. It can be turned on manually.
![]() |