Evaporator Operation

The following is a summary of a depositon run:

1. Make a reservation (optional). See section 3.1
2. Before you touch the evaporator, start a log entry. See section 3.2
3. Vent the deposition chamber. See section 3.3
4. Perform pre-load operations. See section 3.4
5. Load metal chages into the hearth. See section 3.5
6. Load your samples. See section 3.6.
7. Pump down the deposition chamber. See section 3.3
8. Program the IC6000. See section 3.8
9. Initialize the e-beam high voltage system. See section 3.7
10. Perform the Evaporation. See section 3.9
11. Shut down the e-beam high voltage system. See section 3.7
12. Vent the deposition chamber. See section 3.3
13. Remove samples, metal charges, and close your log entry. See section 3.2
14. Pump down the deposition chamber. See section 3.3