Evaporation

After the vacuum chamber has reached adequate pressure ( $~0.5\times10^{-7}Torr$), the IC6000 has been programed (Section 3.8), and the high voltage system has been initialized (Section 3.7), you are ready to begin evaporation. You should do the following:

1. Go to the IC6000 ``Data'' screen by pressing ``Disp'' followed by ``8''
2. Select the recipe you programmed by pressing ``FLM#'' followed by the recipe number (note that the buttons are quite sticky. Make sure that the ``FILM: `` indicator at the bottom of the screen changes to the proper film number)
3. Update your log entry with the proper ``XTAL Value'' and ``Base Pressure'' (Section 3.3).
4. On E-beam 2, turn the ion gauge sensitivity to the minimum ($10^{-4}$) position.

At this point, you are ready to begin evaporation. Evaporation can be performed either automatically or manually.