next up previous
Next: IC-6000 Up: Evaporator Operation Previous: Sample Loading


The High Voltage System

The following steps are required to initialize the high voltage subsytem of the evaporator:

  1. Turn on the power supply circuit breaker. This is located on the actual physical supply. For e-beam 1 the supply is located to the left of the deposition chamber and there are two breaker switches which can be turned on in either order. For e-beam 2, the supply is located in the grey area utility coridor behind and to the right of the instrument.

    Figure 20: The Ebeam-1 supply and circuit breakers
    \scalebox{0.5}{\includegraphics{images/e1supplyb.eps}}

    Figure 21: The Ebeam-2 supply and circuit breaker
    \scalebox{0.5}{\includegraphics{images/e2supplyb.eps}}

  2. Turn on the enable key on the high-voltage panel. This is a standard key on e-beam 2. You must push in on the bicycle-lock style key on e-beam 1 in order to turn it.

    Figure 22: Ebeam-2 High Voltage Controls
    \scalebox{0.5}{\includegraphics{images/e1keyb.eps}}

    Figure 23: Ebeam-2 High Voltage Controls
    \scalebox{0.5}{\includegraphics{images/e2keyb.eps}}

  3. Turn on the high voltage. Press the ``High Voltage On'' button. The high voltage light should come on.

  4. Turn on the gun filament. Press the ``Gun filament On'' button. It should illuminate. On e-beam 1, the ``Gun filament Off'' button has a tendency to stick, so you may need to jiggle it until it pops out before you turn on the gun filament. Additionally, on e-beam 1 you must hold the ``Gun filament on'' button down for a couple of seconds before the filament turns on.

Figure 24: Ebeam-1 High Voltage Control
\scalebox{0.5}{\includegraphics{images/e1hvfloorb.eps}}

E-beam 1 has a high-voltage controller with a power switch at the bottom of the control tower. In general this is left in the ``on'' position at all times, but occasionally someone turns it off. The high voltage system will not operate unless it is on.

The following steps are required to shut down the high voltage subsystem of the evaporator. If you have just finished evaporating, you should wait at least 5 minutes before turning off the power supply circuit breaker to allow the supply fan to continue running.

  1. Turn off the gun filament. Press the ``Gun filament Off'' button.
  2. Turn off the high voltage. Press the ``High Voltage Off'' button.
  3. Turn off the enable key on the high-voltage panel.
  4. Turn off the power supply circuit breaker(s).


next up previous
Next: IC-6000 Up: Evaporator Operation Previous: Sample Loading
Collin W. Hitchcock 2002-02-28