Micro and Nano Fabrication
Clean Room





Processes - Metallization and BEOL - E Beam - E Beam #2

For training on this equipment, contact the assigned module leads
E Beam Evaporator #2

E Beam Evaporator #2

Links (Under Construction)


General Information

Under Construction

Training & Usage

Please contact the module lead to schedule a training session. After attending the training session, you are expected to return within one week with your own sample to test in the presence of the module lead. You may NOT use the equipment unsupervised until you have successfully passed the test.

If you do not log onto the E Beam Evaporator for any sixty (60) day period, you forfeit your qualification and must schedule your next session with the module lead to re-test. 

Currently, the equipment is password protected. Qualified users are notified of the current password, as well as the equipment condition, via e-mail on a weekly basis


Reservations

Reservations for the equipment may be made on the scheduling sheet next to the equipment, or by contacting the module lead.

Procedures & Documentation

Introduction

Training

Evaporator Operation

User Maintenance

Metal Density and Z Ratios

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