Micro and Nano Fabrication Clean Room


 







Processes - High Temperature - Diffusion






Bruce Oxidation Furnace
ASM Oxidation Furnace










The following tools are presently used for Diffusion processes:








MNCR Staff





Clean Room
Manager

David King
(518)-276-2938
kingdc@rpi.edu

Senior Applications
Engineer

David Frey
(518)-276-3323
freym2@rpi.edu

Process
Engineer

Bryant Colwill
(518)-276-3946
colwib2@rpi.edu


Equipment
Engineer

John Barthel
(518)- 276-2975
barthj@rpi.edu

Equipment
Engineer

Kent Way
(518)- 276-3317
wayk2@rpi.edu