Micro and Nano Fabrication
Clean Room

Processes - Measurement - Thin Film - Dektak 8 Surface Profiler


Dektak 8 Surface Profiler


General Information

The Dektak 8 profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. Veeco's exclusive N-Lite low force sensor option offers stylus forces down to 0.03mg, for scratch-free measurement of soft materials. N-Lite also enables the use of super-sharp styli which can characterize sub-micron lines and spaces, while high aspect ratio tips access deep trenches, measure Shallow Trench Isolation (STI) etch depth, and probe deep structures for MEMS research.

Technical Specs

Measurement Technique: Stylus profilometry
Sample Viewing: 70x (low mag) and 280x(high mag)
Stylus Downforce: 0.04mg to 15mg
Styus Options: 0.2um (currently installed) and 2.5um
Scan Length: 50mm (200mm with software stitching)
Max. Sample Thickness: 24.5mm
Sample Size: approx. 15mm x 15mm (min) up to 200mm (max)
Vertical Range: up to 1mm
Vertical Resolution: approx. 15nm
Contour and 3D Mapping: Images below were made using our Dektak8 and the onboard Vision 32 rendering program.

Training & Usage

Please review the operating manual and then contact the module lead to schedule a training session. Please bring your sample to the the training seesion or, alternatively, we can use the Veeco standard. You may NOT use the equipment unsupervised until you have completed the training and have been added to the approved users list.


No reservations needed. Tool runs on a 'first come, first serve' basis. We ask that users curtail any continous use to less then 3hrs per session.

Procedures and Documentation