Micro and Nano Fabrication Clean Room

Equipment Problem Log

Wednesday, September 12, 2007

Updates are in Bold Red Type

 
Plasmatherm – 8/27/07
 
All processes in both chambers are available
SF6 pneumatic control valve has been replaced.
Silicon etch rates are consistently a lot lower than expected.
Troubleshooting of Silicon Etch Rate problem is in progress
Users must verify etch rate prior to running a critical Silicon Etch process.

Alcatel Deep RIE Etcher – Kent Way – 8/22/07

 
Etcher is not available due to failed turbopump. ETR TBD.
 
Zeiss Crossbeam – David Frey – 8/22/07
 
FE Tip has been replaced.
A new FIB column is on order. ETR TBD.