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Leo J. Schowalter
Professor of Physics, Applied Physics, and Astronomy,
Rensselaer Polytechnic Institute
Education:
Ph.D., Physics, University of Illinois at Urbana-Champaign,
1981
M.S., Physics, University of Illinois at Urbana-Champaign,
1976
B.S., Physics and Mathematics, summa cum laude, University
of Idaho, 1975
Career Highlights:
Schowalter began his professional career at the GE Research and
Development Center in Schenectady, N.Y. as a staff physicist in
1980. He joined Rensselaer in 1987 as an associate professor and
was promoted to full professor in 1993. He served as associate director
of the Center for Integrated Electronics and Electronics Manufacturing
(now the Center for Integrated Electronics) from 1994 to 1997 and
as chair of the Physics, Applied Physics, and Astronomy Department
from 1997 to 2000. In addition to his professorial role, Schowalter
is president and co-founder of Crystal IS, Inc., the only supplier
of single-crystal AlN substrates for the nitride semiconductor industry.
Dr. Schowalter has been an active leader for several
professional meetings, including serving as chair of the 1999 Gordon
Research Conference on Thin Films and Crystal Growth Mechanisms
and as meeting chair of the 1998 Spring Materials Research Society
Meeting in San Francisco. He also has been a co-instructor for several
tutorials at international meetings on nitride semiconductors.
Schowalter has published over 130 articles, co-edited
four proceedings volumes, and served as associate editor of the
Journal of Vacuum Science and Technology from 1995 to 1998.
He holds two U.S. patents and has three patents pending. Schowalter
was elected to the Sigma Xi Honor Society in 1981 and was a distinguished
visiting scientist at NASA's Jet Propulsion Laboratory at the California
Institute of Technology from 1989 to 1990.
Research Areas:
Schowalter's research involves molecular beam epitaxy, electron
transport at interfaces, optical properties of semiconductors, and
the growth of wide band gap semiconductors. These wide band gap
materials have the potential to revolutionize such fields as high-density
data storage, high-temperature circuits, high-power circuits, wireless
communications, and flat-panel displays, if methods can be found
to produce low-defect materials in commercial quantities. His group
has successfully grown aluminum nitride crystals large enough to
slice into semiconductor substrates, which can be used to grow wide
band gap semiconductor materials for blue lasers or to fabricate
blue and green light emitting diodes (LEDs).
His current projects include preparing AlN substrate
surfaces for epitaxy, using chemical-mechanical polishing (CMP);
characterizing AlN and other wide band gap semiconductor surfaces
for defects and subsurface damage; and making optical measurements
of absorption in AlN to determine impurity and other point defect
concentrations. He also is working with atomic force microscopy
measurements and electric potential measurements of carbon nanotubes,
to determine the possibility of making self-assembled electrical
connections and switches for future very large-scale integration
(VLSI) chips.
His research is funded by the New York State Science
and Technology Foundation, the Defense Advanced Research Projects
Agency (DARPA), International SEMATECH, the New York Interconnect
Focus Research Center, Air Force Office of Scientific Research (AFOSR),
the Missile Defense Agency (MDA), and Crystal IS, Inc.
Selected Publications:
S.B. Schujman, R. Vajtai, S. Biswas, B. Dewhirst, L.J. Schowalter,
and P. Ajayan "Electrical Behavior of Isolated Multiwall Carbon
Nanotubes Characterized by Scanning Surface Potential Microscopy,"
Applied Physics Letters, 81,
541, (2002).
J. Carlos Rojo, L.J. Schowalter, R. Gaska, M.
Shur, M.A. Khan, J. Yang, and D.D. Koleske, "Growth and Characterization
of Epitaxial Layers on Aluminum Nitride Substrates Prepared from
Bulk, Single Crystals," Journal of Crystal Growth, 240,
508, (2002).
R. Gaska, C. Chen, J. Yang, E. Kuokstis, A. Khan,
G. Tamulaitis, I. Yilmaz, M.S. Shur, J.C. Rojo, and L.J. Schowalter,
"Deep-Ultraviolet Emission of AlGaN/AlN Quantum Wells on Bulk
AlN," Applied Physics Letters, 81,
4658, (2002).
E. Kuokstis, J. Zhang, Q. Fareed, J. W. Yang,
G. Simin, M.A. Khan, R. Gaska, M. Shur, J.C. Rojo, and L.J. Schowalter,
"Near-Band-Edge Photoluminescence of Wurtzite-Type AlN,"
Applied Physics Letters, 81,
2755, (2002).
J.C. Rojo, G.A. Slack, K. Morgan, B. Raghothamachar,
M. Dudley, and L.J. Schowalter, "Report on the Growth of Bulk
Aluminum Nitride and Subsequent Substrate Preparation," Journal
of Crystal Growth, 231,
317, (2001).
"Epitaxial Growth of AlN and Al0.5Ga0.5N
Layers on Aluminum Nitride Substrates," L.J. Schowalter, Y.
Shusterman, R. Wang, I. Bhat, G. Arunmozhi, and G.A. Slack, Applied
Physics Letters, 76,
985, (2000).
C.A. Ventrice Jr., V.P. LaBella, G. Ramaswamy,
H.P. Yu, and L.J. Schowalter, "Measurement of Hot-Electron
Scattering Processes at Au/Si(100) Schottky Interfaces by Temperature-Dependent
Ballistic Electron Emission Microscopy," Physical Review
B, 53, 3952-3959, (1996).
K. Yang and L.J. Schowalter, "Diffusion Length
of Ga Atoms on GaAs(111)
Surface in the
Reconstruction Growth Regime," Applied Physics Letters,
64, 1641, (1994).
K. Yang, T. Anan, and L.J. Schowalter, "Strain
in Pseudomorphic Films Grown on Arbitrarily Oriented Substrates,"
Applied Physics Letters, 65,
2789, (1994).
W. Li, T. Anan, and L.J. Schowalter, "Nucleation
of GaAs on CaF2/Si(111) Substrates,'' Applied Physics Letters,
65, 595, (1994).
Contact Information:
Leo J. Schowalter
Science Center
Rensselaer Polytechnic Institute
110 Eighth Street
Troy, N.Y. 12180 USA
(518) 276-6435
E-mail: schowl@rpi.edu
http://www.rpi.edu/~schowl/schowalt.htm
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