Thin film research is centered in two main areas; thin films for microelectronic applications and thin films for photonic applications. Below I list the various research projects we have with links to those individual projects for more information.
Microelectronics Applications -
research in this area is centered on low dielectric constant materials.
Here we are mainly interested in nanoporous materials and their chemical, mechanical,
thermal, electrical, and interfacial properties.
Mechanical Properties - measurement and prediction of eleastic modulus as a function of porosity
Thermal Properties - measurement and prediction of thermal conductivity as a function of porosity
Electrical Properties - diffusion of metals and other dopants into nanoporous materials
Interfacial Properties - stability of thin films deposited on nanoporous substrates
Chemical Properties - reactive ion etching behavior of nanoporous materials
Processing Issues - processing of nanoporous materials, control of porosity, thickness etc.
Photonics Applications - research in this area is focused on materials for integrated optical components and light emitting diodes. The work involves dense and nanoporous organic, inorganic and hybrid materials.
Integrated Optical Waveguides - fabrication of integrated optical waveguides for telecommunications applications and for on-chip optical communications. Fabrication processes include solid-state ionic diffusion and plasma deposition.
Integrated Optical Components - development
of micromirrors, gratings, etc. associated with making the analog of an optical
integrated circuit or optical printed circuit board
a-Si Deposition Processes
Low Refractive Index Materials