Toh-Ming Lu

Ray Palmer Baker Distinguished Professor of Physics


Department of Physics, Applied Physics, and Astronomy
The Center for Future Energy Systems


Ph.D., University of Wisconsin, Physics
M.S., Worcester Polytechnic Institute, Physics
B.S., Cheng Kung University, Taiwan, Physics


1999-2005 Director, SRC Center for Advanced Interconnect Science and Technology (CAIST) (13 universities, 25 faculty, 40 graduate students)
1996-1999 Associate Director CAIST
1997 Associate Director, Center for Integrated Electronics, Rensselaer
1992-1997 Chairman, Department of Physics, Applied Physics, and Astronomy,  Rensselaer Polytechnic Institute
1982-present    Faculty, Department of Physics, Assistant Professor: '82-'86, Associate Professor: '86-'89, Full Professor: '89, Rensselaer Polytechnic Institute
1979-1982 Research Associate, Materials Science, University of Wisconsin, Madison
1979-1980 Guest Scientist, National Bureau of Standards, Washington, DC
1977-1978 Physics and Math Teacher, Catholic High School, Sibu Malaysia

Research Interests

  • Nanotechnology
  • Advanced Materials
  • Diffraction from imperfect surfaces, overlayers, and dynamic growth fronts.
  • Surface, interface, and thin film morphologies and ordering.
  • Ionized cluster beam/partially ionized beam deposition of low temperature films.
  • Growth and characterization of metal, ceramic, and polymeric thin films for microelectronics, photonics, and nanoelectronics applications.
  • Since '82, well funded research by NSF, DARPA, ARO, AFOSR, IBM, DEC, Kodak, Martin-Marietta, GE, Intel, Sheldahl, and AT&T


  • Fellow of Materials Research Society (2008)
  • Fellow of American Association for the Advancement of Sciences (2007) 
  • Semiconductor Research Corporation (SRC) Faculty Leadership Award (2005)
  • Williams Wiley Distinguished Faculty Award (2002)
  • Fellow of American Vacuum Society (1995)
  • Fellow of the American Physical Society (1994)
  • Member of New York Academy of Sciences (1994)
  • Rensselaer Center for Integrated Electronics Faculty Award (1993)
  • Semiconductor Research Corporation (SRC) Invention Award (1988)
  • Rensselaer Early Career Award (1986)


Toh-Ming Lu

Rensselaer Polytechnic Institute
Low Center for Industrial Innovation
Rm: CII 6017
110 8th Street
Troy, New York 12180

Office: (518) 276-2979