T Paul Chow

T. Paul Chow

Professor and Campus Director, CPES


Department of Electrical, Computer & Systems Engineering, Rensselaer Polytechnic Institute


Ph.D., Rensselaer Polytechnic Institute, Electrical Engineering
M.S., Columbia University, Materials Science
B.S., Augustana College, Mathematics and Physics


From 1977-1989, Dr. Chow worked at General Electric Corporate Research and Development, Schenectady, NY. In the first two years, he was involved with developing CVD processes and characterization of doped tin oxide and indium oxide thin films for transparent electrode applications in solid-state imagers.

From 1979-1982, his work on refractory metals and metal silicides included the deposition and plasma etching of these films as well as their incorporation into integrated-circuit processes and performance characterization of test devices and logic circuits.

From 1982 to 1989, he participated in the design and process development of various discrete and integrable MOS-gated unipolar and bipolar devices (such as the MOSFET, IGBT and MCT). Also, he was involved with process architecture and integration of high-voltage power integrated circuits.

Since 1989, he has been in the faculty of the Electrical, Systems and Computer Engineering Department of Rensselaer Polytechnic Institute, Troy, NY, where he is now Professor. His

Research Interests

  • Semiconductors
  • Electronics and circuits
  • Electronic materials
  • Circuits

Dr. Chow's present research interests are in developing new device concepts and circuit models for high-voltage power devices and integrated circuits, in process research of silicon and wide bandgap compound semiconductors, and process integration of ULSI metallization.


Dr. Chow has published over 70 papers in refereed scientific journals, presented over a hundred conference talks, contributed four chapters in technical textbooks and has over ten patents.

He received the Solid State Science and Technology Young Author Award of the Electrochemical Society in 1982 and the Horizon Award from Augustana College in 1986.

He is a member of the Electrochemical Society and a senior member of IEEE. He is also presently an AdCom member of the IEEE Electron Devices Society.


T. Paul Chow

Jonsson Engineering Center
Room 6601
Rensselaer Polytechnic Institute
110 8th Street
Troy, New York 12180

Office: (518) 276-2910
Fax: (518) 276-8761