MTLE-6300

Integrated Circuit Fabrication Laboratory

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied. (Cross listed as ECSE-6300. Students cannot obtain credit for both this course and ECSE-6300.) Prerequisite: ECSE-4250 or equivalent. Spring term annually.

3 credit hours