MTLE-4160

Semiconducting Materials

Review of electronic properties of materials. Growth and structure of semiconductors. Diffusion, ion implantation, oxidation, microlithography, plasma etching, thin film deposition, metallization, with emphasis on Si technology. Introduction to compound semiconductors. Students cannot obtain credit for both this course and ECSE-4250. Prerequisite: MTLE-4200 or equivalent. Spring term.

3 credit hours